Inventor
GAMM BJÖRN
DE6 patents
Patents
6 patentsUS10984983B2Apr 20, 2021
Particle beam system and method for operating a particle beam system
ZEISS CARL MICROSCOPY GMBH2 citations68
US11092702B1Aug 17, 2021
Particle beam system and method of operating a particle beam system
ZEISS CARL MICROSCOPY GMBH2 citations66
US12542252B1Feb 3, 2026
Method of operating a particle beam system, particle beam system, non-transitory storage medium and program
ZEISS CARL MICROSCOPY GMBH0 citations48
US12362129B2Jul 15, 2025
Particle beam column
ZEISS CARL MICROSCOPY GMBH0 citations48
US12300461B2May 13, 2025
Particle beam device, method for operating the particle beam device and computer program product
ZEISS CARL MICROSCOPY GMBH0 citations48
US11621145B2Apr 4, 2023
Method for operating a particle beam microscope
ZEISS CARL MICROSCOPY GMBH0 citations46