Inventor

FERNS JASON

US9 patents

⚠️ This page may combine multiple inventors who share the name “FERNS JASON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

3 patents

US7221989B2May 22, 2007

Optical metrology model optimization for process control

TOKYO ELECTRON LTD18 citations89

US10453653B2Oct 22, 2019

Endpoint detection algorithm for atomic layer etching (ALE)

TOKYO ELECTRON LTD3 citations72

US10692705B2Jun 23, 2020

Advanced optical sensor and method for detecting an optical event in a light emission signal in a plasma chamber

TOKYO ELECTRON LTD5 citations71

TIMBRE TECH INC

2 patents

US7065423B2Jun 20, 2006

Optical metrology model optimization for process control

TIMBRE TECH INC58 citations92

US7395132B2Jul 1, 2008

Optical metrology model optimization for process control

TIMBRE TECH INC11 citations82

INNOVUSION IRELAND LTD

2 patents

US11860313B2Jan 2, 2024

LiDAR systems and methods for focusing on ranges of interest

INNOVUSION IRELAND LTD0 citations62

US11675053B2Jun 13, 2023

LiDAR systems and methods for focusing on ranges of interest

INNOVUSION IRELAND LTD0 citations62

FERNS JASON

1 patent

US8666703B2Mar 4, 2014

Method for automated determination of an optimally parameterized scatterometry model

FERNS JASON12 citations74

INNOVUSION INC

1 patent

US12276759B2Apr 15, 2025

LiDAR systems and methods for focusing on ranges of interest

INNOVUSION INC0 citations62