Inventor
BOSE FRANK
CH9 patents
⚠️ This page may combine multiple inventors who share the name “BOSE FRANK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LSI LOGIC CORP
6 patentsUS5401350AMar 28, 1995
Coil configurations for improved uniformity in inductively coupled plasma systems
LSI LOGIC CORP370 citations97
US5639519AJun 17, 1997
Method for igniting low pressure inductively coupled plasma
LSI LOGIC CORP40 citations95
US5468296ANov 21, 1995
Apparatus for igniting low pressure inductively coupled plasma
LSI LOGIC CORP80 citations95
US5407524AApr 18, 1995
End-point detection in plasma etching by monitoring radio frequency matching network
LSI LOGIC CORP73 citations95
US5578165ANov 26, 1996
Coil configurations for improved uniformity in inductively coupled plasma systems
LSI LOGIC CORP31 citations91
US6062163AMay 16, 2000
Plasma initiating assembly
LSI LOGIC CORP12 citations73