Inventor
MOMMA TORU
JP12 patents
Patents
12 patentsUS11203094B2Dec 21, 2021
Substrate cleaning device, substrate processing apparatus, substrate cleaning method and substrate processing method
SCREEN HOLDINGS CO LTD3 citations69
US10920764B2Feb 16, 2021
Pumping apparatus, treatment solution supplying device, substrate treating apparatus, liquid draining method, and liquid replacing method
SCREEN HOLDINGS CO LTD3 citations69
US10651056B2May 12, 2020
Treating liquid vaporizing apparatus
SCREEN HOLDINGS CO LTD1 citations62
US9972516B2May 15, 2018
Exposure device, substrate processing apparatus, exposure method for substrate and substrate processing method
SCREEN HOLDINGS CO LTD1 citations51
US11404629B2Aug 2, 2022
Treating solution supply apparatus
SCREEN HOLDINGS CO LTD0 citations48
US11000783B2May 11, 2021
Pumping apparatus, treatment solution supplying device, and substrate treating apparatus
SCREEN HOLDINGS CO LTD0 citations48
US10236200B2Mar 19, 2019
Exposure device and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations41
US10627836B2Apr 21, 2020
Pumping apparatus and substrate treating apparatus
SCREEN HOLDINGS CO LTD0 citations39
US10629463B2Apr 21, 2020
Thermal processing apparatus and thermal processing method
SCREEN HOLDINGS CO LTD0 citations38
US10214814B2Feb 26, 2019
Substrate treating apparatus and treatment gas supplying nozzle
SCREEN HOLDINGS CO LTD0 citations38
US10668591B2Jun 2, 2020
Substrate cleaning device, substrate processing apparatus and substrate cleaning method
SCREEN HOLDINGS CO LTD0 citations37
US10331049B2Jun 25, 2019
Substrate cleaning device and substrate processing apparatus including the same
SCREEN HOLDINGS CO LTD0 citations37