Inventor · disambiguated record
Yasuhiro Marume
Also filed as: MARUME YASUHIRO
6 granted patents·1 pending application·68 citations·filing 1999–2003
82Inventor score
Top patents by PatentIndex Score
7 records- 0166US6529792B1Process equipment selecting system and method for selecting process equipmentMITSUBISHI ELECTRIC CORP·Filed 2000·Granted Mar 4, 2003·14 cites·20 claims
- 0262US6593154B2Apparatus and method for controlling semiconductor manufacturing system utilizing recycled wafersMITSUBISHI ELECTRIC CORP·Filed 2002·Granted Jul 15, 2003·9 cites·12 claims
- 0361US6480755B1Process control device and process control method permitting processing order and processing condition to be changed while manufacturing process continuesMITSUBISHI ELECTRIC CORP·Filed 1999·Granted Nov 12, 2002·34 cites·12 claims
- 0450US6823229B2Substrate carrier management system and programRENESAS TECH CORP·Filed 2002·Granted Nov 23, 2004·3 cites·8 claims
- 0537US6463348B1Process control device and process control method enabling restoration of lot controlMITSUBISHI ELECTRIC CORP·Filed 1999·Granted Oct 8, 2002·5 cites·7 claims
- 0637US2004158344A1Mask management device in semiconductor wafer production processRENESAS TECH CORP·Filed 2003·Application pending·0 cites
- 0727US6397119B1Semiconductor manufacturing system for simultaneous processing of prescribed number of lotsMITSUBISHI ELECTRIC CORP·Filed 1999·Granted May 28, 2002·3 cites·18 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →