Inventor
INOBE TAKAMASA
JP6 patents
⚠️ This page may combine multiple inventors who share the name “INOBE TAKAMASA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
5 patentsUS6480755B1Nov 12, 2002
Process control device and process control method permitting processing order and processing condition to be changed while manufacturing process continues
MITSUBISHI ELECTRIC CORP34 citations88
US6529792B1Mar 4, 2003
Process equipment selecting system and method for selecting process equipment
MITSUBISHI ELECTRIC CORP14 citations82
US6593154B2Jul 15, 2003
Apparatus and method for controlling semiconductor manufacturing system utilizing recycled wafers
MITSUBISHI ELECTRIC CORP9 citations72
US6463348B1Oct 8, 2002
Process control device and process control method enabling restoration of lot control
MITSUBISHI ELECTRIC CORP5 citations58
US6397119B1May 28, 2002
Semiconductor manufacturing system for simultaneous processing of prescribed number of lots
MITSUBISHI ELECTRIC CORP3 citations58