P

Inventor

YAMAGUCHI TATSUYA

JP110 patents
⚠️ This page may combine multiple inventors who share the name “YAMAGUCHI TATSUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

24 patents
US8778815B2Jul 15, 2014

Film forming method

TOKYO ELECTRON LTD72 citations98
US11367633B2Jun 21, 2022

Heat treatment apparatus and heat treatment method

TOKYO ELECTRON LTD7 citations86
US11927394B2Mar 12, 2024

Heat treatment apparatus and heat treatment method

TOKYO ELECTRON LTD2 citations73
US10960435B2Mar 30, 2021

Film forming apparatus, film forming method, and storage medium

TOKYO ELECTRON LTD2 citations73
US10446438B2Oct 15, 2019

Method of manufacturing semiconductor device

TOKYO ELECTRON LTD2 citations73
US10325780B2Jun 18, 2019

Method of manufacturing semiconductor device

TOKYO ELECTRON LTD2 citations73
US11114319B2Sep 7, 2021

Heat treatment apparatus and heat treatment method

TOKYO ELECTRON LTD6 citations71
US10431479B2Oct 1, 2019

Heat treatment apparatus and temperature control method

TOKYO ELECTRON LTD2 citations71
US12563984B2Feb 24, 2026

Semiconductor device manufacturing method and semiconductor device manufacturing system

TOKYO ELECTRON LTD0 citations63
US12347671B2Jul 1, 2025

Semiconductor device manufacturing method and semiconductor device manufacturing system

TOKYO ELECTRON LTD0 citations63
US10840084B2Nov 17, 2020

Method of manufacturing semiconductor device and substrate processing apparatus

TOKYO ELECTRON LTD1 citations63
US11923242B2Mar 5, 2024

Method of manufacturing semiconductor device

TOKYO ELECTRON LTD0 citations62
US11843027B2Dec 12, 2023

Method of manufacturing semiconductor device

TOKYO ELECTRON LTD0 citations62
US11569098B2Jan 31, 2023

Heat treatment apparatus

TOKYO ELECTRON LTD0 citations62
US11456184B2Sep 27, 2022

Substrate processing method and substrate processing system

TOKYO ELECTRON LTD0 citations62
US11282699B2Mar 22, 2022

Substrate processing apparatus

TOKYO ELECTRON LTD0 citations62
US11056349B2Jul 6, 2021

Method of fabricating semiconductor device, vacuum processing apparatus and substrate processing apparatus

TOKYO ELECTRON LTD0 citations62
US10593556B2Mar 17, 2020

Method of fabricating semiconductor device, vacuum processing apparatus and substrate processing apparatus

TOKYO ELECTRON LTD1 citations62
US8354135B2Jan 15, 2013

Thermal processing apparatus, method for regulating temperature of thermal processing apparatus, and program

TOKYO ELECTRON LTD4 citations62
US8055372B2Nov 8, 2011

Processing system, processing method, and computer program

TOKYO ELECTRON LTD5 citations62
US11387139B2Jul 12, 2022

Method of manufacturing semiconductor device

TOKYO ELECTRON LTD0 citations61
US11342223B2May 24, 2022

Semiconductor device manufacturing method and substrate processing apparatus

TOKYO ELECTRON LTD0 citations61
US11081321B2Aug 3, 2021

Substrate processing apparatus

TOKYO ELECTRON LTD1 citations61
US10957531B2Mar 23, 2021

Method of manufacturing semiconductor device

TOKYO ELECTRON LTD0 citations61

OLYMPUS OPTICAL CO

14 patents

DAIICHI SEIYAKU CO

2 patents

JAMCO CORP

1 patent

TOYODA AUTOMATIC LOOM WORKS

1 patent

KANBARA KOUJI

1 patent

OTSUKA PHARMA CO LTD

1 patent

DAIICHI SANKYO CO LTD

1 patent

NANTERO INC

1 patent

FUJITSU LTD

1 patent

FUJI PHOTO FILM CO LTD

1 patent

NIPPON CATALYTIC CHEM IND

1 patent

YOSHII KOJI

1 patent

Showing the top 50 of 110 patents by PatentIndex Score.