Inventor
TAJIKA HIROHUMI
JP2 patents
Patents
2 patentsUS6550116B2Apr 22, 2003
Method for manufacturing a bimorph piezoelectric device for acceleration sensor
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD11 citations70
US6246155B1Jun 12, 2001
Bimorph piezoelectric device for acceleration sensor and method of its manufacture
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD14 citations70