Inventor
TANGE KOJI
JP4 patents
⚠️ This page may combine multiple inventors who share the name “TANGE KOJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
3 patentsUS6511792B2Jan 28, 2003
Developing process, process for forming pattern and process for preparing semiconductor device using same
MITSUBISHI ELECTRIC CORP7 citations66
US6639232B1Oct 28, 2003
Pattern writing method employing electron beam writing device of variable-shaped vector scan system
MITSUBISHI ELECTRIC CORP2 citations56
US6338923B1Jan 15, 2002
Photolithography mask having monitoring marks and manufacturing method thereof
MITSUBISHI ELECTRIC CORP0 citations48