Inventor
STEINHAUSLER THOMAS
US5 patents
⚠️ This page may combine multiple inventors who share the name “STEINHAUSLER THOMAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ARCH SPEC CHEM INC
3 patentsUS6323287B1Nov 27, 2001
Hydroxy-amino thermally cured undercoat for 193 NM lithography
ARCH SPEC CHEM INC33 citations91
US6610808B2Aug 26, 2003
Thermally cured underlayer for lithographic application
ARCH SPEC CHEM INC28 citations90
US6924339B2Aug 2, 2005
Thermally cured underlayer for lithographic application
ARCH SPEC CHEM INC12 citations82