Inventor
BUSSO MARIO
IT4 patents
Patents
4 patentsUS4713619ADec 15, 1987
Electronic device for feeding ion pump
VARIAN SPA11 citations69
US7621721B2Nov 24, 2009
Vacuum pumping device with electronic control of the motor
VARIAN SPA2 citations59
US7059192B2Jun 13, 2006
Pressure sensor
VARIAN SPA6 citations58
US5017836AMay 21, 1991
Electronic feeder for an ion pump
VARIAN SPA2 citations51