Inventor
BOUMAN WILLEM JAN
NL5 patents
⚠️ This page may combine multiple inventors who share the name “BOUMAN WILLEM JAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
4 patentsUS7532308B2May 12, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV12 citations78
US11892776B2Feb 6, 2024
Imaging via zeroth order suppression
ASML NETHERLANDS BV0 citations56
US10001712B2Jun 19, 2018
Immersion lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations51
US10324384B2Jun 18, 2019
Lithographic apparatus and a method of manufacturing a lithographic apparatus
ASML NETHERLANDS BV0 citations40