Inventor
TIEGER DANIEL R
US16 patents
⚠️ This page may combine multiple inventors who share the name “TIEGER DANIEL R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS11664192B2May 30, 2023
Temperature control for insertable target holder for solid dopant materials
APPLIED MATERIALS INC6 citations82
US10957509B1Mar 23, 2021
Insertable target holder for improved stability and performance for solid dopant materials
APPLIED MATERIALS INC8 citations82
US11170973B2Nov 9, 2021
Temperature control for insertable target holder for solid dopant materials
APPLIED MATERIALS INC8 citations81
US10896799B1Jan 19, 2021
Ion source with multiple configurations
APPLIED MATERIALS INC3 citations69
US11482397B1Oct 25, 2022
High output ion source, ion implanter, and method of operation
APPLIED MATERIALS INC4 citations67
US12400828B2Aug 26, 2025
Temperature control for insertable target holder for solid dopant materials
APPLIED MATERIALS INC0 citations59
AXCELIS TECH INC
4 patentsUS7759657B2Jul 20, 2010
Methods for implanting B22Hx and its ionized lower mass byproducts
AXCELIS TECH INC34 citations88
US7589333B2Sep 15, 2009
Methods for rapidly switching off an ion beam
AXCELIS TECH INC12 citations83
US7531819B2May 12, 2009
Fluorine based cleaning of an ion source
AXCELIS TECH INC18 citations77
US8350236B2Jan 8, 2013
Aromatic molecular carbon implantation processes
AXCELIS TECH INC2 citations62
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC
3 patentsUS9691584B1Jun 27, 2017
Ion source for enhanced ionization
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC8 citations84
US10290461B1May 14, 2019
Ion source for enhanced ionization
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC3 citations73
US11404254B2Aug 2, 2022
Insertable target holder for solid dopant materials
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC6 citations72