Inventor
YONEKAWA TSUKASA
JP5 patents
⚠️ This page may combine multiple inventors who share the name “YONEKAWA TSUKASA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS7304002B2Dec 4, 2007
Method of oxidizing member to be treated
TOKYO ELECTRON LTD8 citations72
US7625604B2Dec 1, 2009
Heat treatment method and heat treatment apparatus
TOKYO ELECTRON LTD5 citations61
US6933249B2Aug 23, 2005
Method of fabricating semiconductor device
TOKYO ELECTRON LTD3 citations61
US6972235B2Dec 6, 2005
Method for processing semiconductor substrate
TOKYO ELECTRON LTD4 citations60