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Inventor
AREVALO EDWIN A
US
3 patents
⚠️ This page may combine multiple inventors who share the name “AREVALO EDWIN A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN SEMICONDUCTOR EQUIPMENT
1 patent
US7642150B2
Jan 5, 2010
Techniques for forming shallow junctions
VARIAN SEMICONDUCTOR EQUIPMENT
9 citations
82
ENGLAND JONATHAN GERALD
1 patent
US8450193B2
May 28, 2013
Techniques for temperature-controlled ion implantation
ENGLAND JONATHAN GERALD
9 citations
77
VARTAN SEMICONDUCTOR EQUIPMENT
1 patent
US7026229B2
Apr 11, 2006
Athermal annealing with rapid thermal annealing system and method
VARTAN SEMICONDUCTOR EQUIPMENT
9 citations
65