Inventor

LI YINGSHENG

CN2 patents

⚠️ This page may combine multiple inventors who share the name “LI YINGSHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHANGHAI MICROELECTRONICS EQUI

1 patent

US8027028B2Sep 27, 2011

Precise positioning system for dual stage switching exposure

SHANGHAI MICROELECTRONICS EQUI1 citations45

LI XIAOPING

1 patent

US8134689B2Mar 13, 2012

Dual stage positioning and switching system

LI XIAOPING0 citations32