Inventor
WU TE-HUNG
TW11 patents
⚠️ This page may combine multiple inventors who share the name “WU TE-HUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNITED MICROELECTRONICS CORP
6 patentsUS6536130B1Mar 25, 2003
Overlay mark for concurrently monitoring alignment accuracy, focus, leveling and astigmatism and method of application thereof
UNITED MICROELECTRONICS CORP24 citations87
US7913196B2Mar 22, 2011
Method of verifying a layout pattern
UNITED MICROELECTRONICS CORP3 citations61
US7669153B2Feb 23, 2010
Method for correcting photomask pattern
UNITED MICROELECTRONICS CORP5 citations61
US7664614B2Feb 16, 2010
Method of inspecting photomask defect
UNITED MICROELECTRONICS CORP3 citations59
US8042069B2Oct 18, 2011
Method for selectively amending layout patterns
UNITED MICROELECTRONICS CORP3 citations57
US7886254B2Feb 8, 2011
Method for amending layout patterns
UNITED MICROELECTRONICS CORP1 citations49