Inventor
STEVENS RONALD
US9 patents
⚠️ This page may combine multiple inventors who share the name “STEVENS RONALD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
4 patentsUS7976631B2Jul 12, 2011
Multi-gas straight channel showerhead
APPLIED MATERIALS INC247 citations97
US7674352B2Mar 9, 2010
System and method for depositing a gaseous mixture onto a substrate surface using a showerhead apparatus
APPLIED MATERIALS INC25 citations90
US9644267B2May 9, 2017
Multi-gas straight channel showerhead
APPLIED MATERIALS INC6 citations82
US7781016B2Aug 24, 2010
Method for measuring precursor amounts in bubbler sources
APPLIED MATERIALS INC3 citations61