Inventor
TYCHKOV ANDREY SERGEEVICH
NL4 patents
⚠️ This page may combine multiple inventors who share the name “TYCHKOV ANDREY SERGEEVICH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
3 patentsUS10295916B2May 21, 2019
EUV source chamber and gas flow regime for lithographic apparatus, multi-layer mirror and lithographic apparatus
ASML NETHERLANDS BV2 citations70
US11237491B2Feb 1, 2022
Reflective optical element for a radiation beam
ASML NETHERLANDS BV2 citations63
US12007693B2Jun 11, 2024
Laser focussing module
ASML NETHERLANDS BV0 citations38