Inventor

LIN CHIUNG-MIN

TW2 patents

Patents

2 patents

US10564632B2Feb 18, 2020

Systems and methods for sensory automated material handing

TAIWAN SEMICONDUCTOR MFG CO LTD11 citations82

US10018573B2Jul 10, 2018

Dual-function wafer handling apparatus

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations45