Inventor

CHO HAN SOO

US5 patents

⚠️ This page may combine multiple inventors who share the name “CHO HAN SOO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

3 patents

US8937021B2Jan 20, 2015

Methods for forming three dimensional NAND structures atop a substrate

APPLIED MATERIALS INC2 citations59

US10265742B2Apr 23, 2019

Method for in-situ chamber clean using carbon monoxide (CO) gas utlized in an etch processing chamber

APPLIED MATERIALS INC0 citations48

US9236255B2Jan 12, 2016

Methods for forming three dimensional NAND structures atop a substrate

APPLIED MATERIALS INC0 citations39

HAN JOO WON

1 patent

US8932947B1Jan 13, 2015

Methods for forming a round bottom silicon trench recess for semiconductor applications

HAN JOO WON98 citations91

SEMES CO LTD

1 patent

US11967514B2Apr 23, 2024

Apparatus and method for controlling process

SEMES CO LTD0 citations47