Inventor
SHIROTA KAZUO
JP14 patents
⚠️ This page may combine multiple inventors who share the name “SHIROTA KAZUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHINETSU CHEMICAL CO
12 patentsUS6333284B1Dec 25, 2001
Synthetic fused silica member
SHINETSU CHEMICAL CO16 citations82
US6705115B2Mar 16, 2004
Synthetic quartz glass and production process
SHINETSU CHEMICAL CO7 citations73
US6541405B1Apr 1, 2003
Synthetic quartz glass member for excimer laser and method of making
SHINETSU CHEMICAL CO8 citations73
US7232778B2Jun 19, 2007
Synthetic quartz glass ingot, synthetic quartz glass, and methods of manufacture thereof
SHINETSU CHEMICAL CO3 citations62
US7159418B2Jan 9, 2007
Method of producing synthetic quartz glass
SHINETSU CHEMICAL CO4 citations62
US6990836B2Jan 31, 2006
Method of producing fluorine-containing synthetic quartz glass
SHINETSU CHEMICAL CO6 citations62
US7827824B2Nov 9, 2010
Synthetic quartz glass substrate for excimer lasers and making method
SHINETSU CHEMICAL CO3 citations60
US6761951B2Jul 13, 2004
Synthetic quartz glass blank
SHINETSU CHEMICAL CO6 citations59
US11851364B2Dec 26, 2023
Synthetic quartz glass substrate and making method
SHINETSU CHEMICAL CO0 citations56
US7954340B2Jun 7, 2011
Synthetic quartz glass substrate for excimer lasers and making method
SHINETSU CHEMICAL CO0 citations49
US10611676B2Apr 7, 2020
Method for preparing synthetic quartz glass substrate
SHINETSU CHEMICAL CO0 citations40
US10558116B2Feb 11, 2020
Method for preparing synthetic quartz glass substrate
SHINETSU CHEMICAL CO0 citations40