Inventor

ASANO TOSIYA

JP23 patents

⚠️ This page may combine multiple inventors who share the name “ASANO TOSIYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASANO TOSIYA

CANON KK

Scan exposure method and apparatus

Positioning apparatus

Positioning apparatus, exposure apparatus, device manufacturing method, and positioning method

Alignment apparatus, exposure apparatus, and device manufacturing method

Forming apparatus and method of manufacturing article

Imprint apparatus, imprint method, and article manufacturing method

Lithography apparatus, and method of manufacturing article

Control device for generating a control deviation via machine learning

Imprint apparatus, imprint method, method of manufacturing article

Moving control apparatus and moving control method

Moving member mechanism and control method therefor

Simulation method, simulation apparatus, and storage medium

Imprint apparatus and article manufacturing method

Simulation method, simulation apparatus, storage medium, film forming method, and method of producing cured product

Control device, lithography apparatus, measurement apparatus, processing apparatus, planarizing apparatus, and article manufacturing method

Imprint apparatus and method of manufacturing article

Imprint apparatus and article manufacturing method

Vibration suppression apparatus and vibration suppression method

ASANO TOSIYA

Positioning apparatus, exposure apparatus and device manufacturing method

Positioning apparatus

Stage device, method for controlling stage device, exposure apparatus using same, and device manufacturing method

EMOTO KEIJI

Exposure apparatus having a vibration suppressing feature and method of manufacturing device using the exposure apparatus

FURUMOTO MITSUHIRO

Anti-vibration apparatus