Inventor
KING MONROE L
7 patents
Patents
7 patentsUS5177366AJan 5, 1993
Ion beam implanter for providing cross plane focusing
EATON CORP68 citations95
US5091655AFeb 25, 1992
Reduced path ion beam implanter
EATON CORP64 citations95
US4261762AApr 14, 1981
Method for conducting heat to or from an article being treated under vacuum
EATON CORP151 citations95
US4760262AJul 26, 1988
Ion source
EATON CORP19 citations81
US4514636AApr 30, 1985
Ion treatment apparatus
EATON CORP24 citations80
US4700077AOct 13, 1987
Ion beam implanter control system
EATON CORP18 citations73
US4891525AJan 2, 1990
SKM ion source
EATON CORP12 citations72