Inventor
MUNAKATA CHUSUKE
JP13 patents
Patents
13 patentsUS4733063AMar 22, 1988
Scanning laser microscope with aperture alignment
HITACHI LTD68 citations95
US4767211AAug 30, 1988
Apparatus for and method of measuring boundary surface
HITACHI LTD80 citations94
US4731855AMar 15, 1988
Pattern defect inspection apparatus
HITACHI LTD74 citations94
US5140272AAug 18, 1992
Method of semiconductor surface measurment and an apparatus for realizing the same
HITACHI LTD34 citations92
US4876458AOct 24, 1989
Apparatus for measuring particles in liquid
HITACHI LTD48 citations92
US4581578AApr 8, 1986
Apparatus for measuring carrier lifetimes of a semiconductor wafer
HITACHI LTD32 citations91
US4563642AJan 7, 1986
Apparatus for nondestructively measuring characteristics of a semiconductor wafer with a junction
HITACHI LTD34 citations91
US4827143AMay 2, 1989
Monitor for particles of various materials
HITACHI LTD28 citations89
US5252719AOct 12, 1993
Process for preparing protein-oriented membrane
HITACHI LTD16 citations73
US4464627AAug 7, 1984
Device for measuring semiconductor characteristics
HITACHI LTD16 citations70
US4672578AJun 9, 1987
Method of information recording on a semiconductor wafer
HITACHI LTD7 citations68
US4453181AJun 5, 1984
Scanning-image forming apparatus using photo response signal
HITACHI LTD6 citations62
US4791288ADec 13, 1988
Scanning photon microscope for simulataneously displaying both the ampitude and phase distributions of ac photovoltage or photocurrents
HITACHI LTD2 citations59