Inventor
NAKASHIMA NAOTO
JP8 patents
Patents
8 patentsUS4819033AApr 4, 1989
Illumination apparatus for exposure
HITACHI LTD55 citations96
US4668089AMay 26, 1987
Exposure apparatus and method of aligning exposure mask with workpiece
HITACHI LTD85 citations96
US5008702AApr 16, 1991
Exposure method and apparatus
HITACHI LTD33 citations92
US4862008AAug 29, 1989
Method and apparatus for optical alignment of semiconductor by using a hologram
HITACHI LTD21 citations82
US4701050AOct 20, 1987
Semiconductor exposure apparatus and alignment method therefor
HITACHI LTD12 citations74
US4993837AFeb 19, 1991
Method and apparatus for pattern detection
HITACHI LTD12 citations73
US4744666AMay 17, 1988
Alignment detection optical system of projection type aligner
HITACHI LTD8 citations73
US4779986AOct 25, 1988
Reduction projection system alignment method and apparatus
HITACHI LTD2 citations62