P

Inventor

MAUGER PHILIP E

US5 patents
⚠️ This page may combine multiple inventors who share the name “MAUGER PHILIP E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NANOSTRUCTURES INC

3 patents
US5110373AMay 5, 1992

Silicon membrane with controlled stress

NANOSTRUCTURES INC105 citations93
US4966663AOct 30, 1990

Method for forming a silicon membrane with controlled stress

NANOSTRUCTURES INC65 citations93
US4919749AApr 24, 1990

Method for making high resolution silicon shadow masks

NANOSTRUCTURES INC105 citations88

HORIZON TECHNOLOGY GROUP

1 patent
US6151967ANov 28, 2000

Wide dynamic range capacitive transducer

HORIZON TECHNOLOGY GROUP138 citations93

(unassigned)

1 patent
US6556417B2Apr 29, 2003

Method to construct variable-area capacitive transducers

8 citations71