Inventor

KAGAMI FUMITO

JP8 patents

⚠️ This page may combine multiple inventors who share the name “KAGAMI FUMITO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

6 patents

US7701236B2Apr 20, 2010

Each inspection units of a probe apparatus is provided with an imaging unit to take an image of a wafer

TOKYO ELECTRON LTD16 citations82

US7583099B2Sep 1, 2009

Method for re-registering an object to be aligned by re-capturing images using previously registered conditions and storage medium storing a program for executing the method

TOKYO ELECTRON LTD9 citations81

US11894256B2Feb 6, 2024

Substrate holding mechanism, substrate mounting method, and substrate detaching method

TOKYO ELECTRON LTD2 citations68

US12106997B2Oct 1, 2024

Test device, change kit, and method of exchanging change kit

TOKYO ELECTRON LTD0 citations61

US7724007B2May 25, 2010

Probe apparatus and probing method

TOKYO ELECTRON LTD4 citations61

US12557592B2Feb 17, 2026

Processing apparatus and substrate transfer method with first and second suction paths

TOKYO ELECTRON LTD0 citations50

TEL YAMANISHI KK

1 patent

US5264918ANov 23, 1993

Method and device for detecting the center of a wafer

TEL YAMANISHI KK55 citations93

KAGAMI FUMITO

1 patent

US8098412B2Jan 17, 2012

Method for detecting the center of wafer and storage medium storing a program for executing the method

KAGAMI FUMITO5 citations55