Inventor

KANAYAMA KOICHIRO

JP2 patents

⚠️ This page may combine multiple inventors who share the name “KANAYAMA KOICHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOPPAN PRINTING CO LTD

1 patent

US7838177B2Nov 23, 2010

Reflection type photomask blank, reflection type photomask, and method of manufacturing semiconductor device using the same

TOPPAN PRINTING CO LTD2 citations54

MATSUO TADASHI

1 patent

US8394558B2Mar 12, 2013

Reflection type photomask blank, manufacturing method thereof, reflection type photomask, and manufacturing method of semiconductor device

MATSUO TADASHI0 citations40