Inventor
EBATA TAKUMA
JP7 patents
⚠️ This page may combine multiple inventors who share the name “EBATA TAKUMA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
JSR CORP
4 patentsUS7897821B2Mar 1, 2011
Sulfonium compound
JSR CORP15 citations92
US7812105B2Oct 12, 2010
Compound, polymer, and radiation-sensitive composition
JSR CORP25 citations92
US7956142B2Jun 7, 2011
Polymerizable sulfonic acid onium salt and resin
JSR CORP9 citations83
US8026039B2Sep 27, 2011
Radiation-sensitive resin composition
JSR CORP2 citations62