Inventor

CHAO YUAN-FENG

TW2 patents

Patents

2 patents

US9721827B2Aug 1, 2017

Semiconductor arrangement with stress control and method of making

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations67

US9564321B2Feb 7, 2017

Cyclic epitaxial deposition and etch processes

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations49