Inventor
NAKAGOMI Jun
JP5 patents
Patents
5 patentsUS11244810B2Feb 8, 2022
Electric field sensor, surface wave plasma source, and surface wave plasma processing apparatus
TOKYO ELECTRON LTD2 citations70
US10557200B2Feb 11, 2020
Plasma processing device with shower plate having protrusion for suppressing film formation in gas holes of shower plate
TOKYO ELECTRON LTD1 citations58
US9991097B2Jun 5, 2018
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations50
US11508556B2Nov 22, 2022
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations44
US10804078B2Oct 13, 2020
Plasma processing apparatus and gas introduction mechanism
TOKYO ELECTRON LTD0 citations36