P

Inventor

SASAKI HIKOICHIRO

JP5 patents
⚠️ This page may combine multiple inventors who share the name “SASAKI HIKOICHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

3 patents
US10115567B2Oct 30, 2018

Plasma processing apparatus

TOKYO ELECTRON LTD41 citations92
US12198937B2Jan 14, 2025

Etching method and plasma processing apparatus

TOKYO ELECTRON LTD1 citations54
US12476079B2Nov 18, 2025

Plasma processing method and plasma processing apparatus

TOKYO ELECTRON LTD0 citations44

UEDA KOSEI

2 patents
US8129282B2Mar 6, 2012

Plasma etching method and computer-readable storage medium

UEDA KOSEI3 citations53
US8609547B2Dec 17, 2013

Plasma etching method and computer-readable storage medium

UEDA KOSEI0 citations42