Inventor
ISHIBASHI JUNJI
JP4 patents
⚠️ This page may combine multiple inventors who share the name “ISHIBASHI JUNJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patentsUS10115567B2Oct 30, 2018
Plasma processing apparatus
TOKYO ELECTRON LTD41 citations92
US11488807B2Nov 1, 2022
Plasma processing apparatus, processing method, and upper electrode structure
TOKYO ELECTRON LTD1 citations56
US10056230B2Aug 21, 2018
Power supply system, plasma processing apparatus and power supply control method
TOKYO ELECTRON LTD1 citations50