Inventor

KUMAGAI Fumitoshi

JP3 patents

Patents

3 patents

US10755894B2Aug 25, 2020

Power supply system

TOKYO ELECTRON LTD40 citations92

US10115567B2Oct 30, 2018

Plasma processing apparatus

TOKYO ELECTRON LTD41 citations92

US9922802B2Mar 20, 2018

Power supply system, plasma etching apparatus, and plasma etching method

TOKYO ELECTRON LTD34 citations92