P

Inventor

ABE TAKAYUKI

JP132 patents
⚠️ This page may combine multiple inventors who share the name “ABE TAKAYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NUFLARE TECHNOLOGY INC

14 patents
US7740991B2Jun 22, 2010

Beam dose computing method and writing method and record carrier body and writing apparatus for determining an optimal dose of a charged particle beam

NUFLARE TECHNOLOGY INC19 citations92
US7601968B2Oct 13, 2009

Charged particle beam writing method and apparatus

NUFLARE TECHNOLOGY INC19 citations92
US9177372B2Nov 3, 2015

Defect estimation device and method and inspection system and method

NUFLARE TECHNOLOGY INC5 citations84
US8781212B2Jul 15, 2014

Defect estimation device and method and inspection system and method

NUFLARE TECHNOLOGY INC6 citations84
US7973918B2Jul 5, 2011

Apparatus and method for pattern inspection

NUFLARE TECHNOLOGY INC10 citations84
US7863586B2Jan 4, 2011

Writing data creation method and charged particle beam writing apparatus

NUFLARE TECHNOLOGY INC10 citations84
US7662522B2Feb 16, 2010

Method for manufacturing semiconductor devices, and method for forming a pattern onto an exposure mask

NUFLARE TECHNOLOGY INC11 citations84
US8352889B2Jan 8, 2013

Beam dose computing method and writing method and record carrier body and writing apparatus

NUFLARE TECHNOLOGY INC5 citations83
US7669174B2Feb 23, 2010

Pattern generation method and charged particle beam writing apparatus

NUFLARE TECHNOLOGY INC10 citations83
US7608845B2Oct 27, 2009

Charged particle beam writing apparatus and method thereof, and method for resizing dimension variation due to loading effect

NUFLARE TECHNOLOGY INC11 citations83
US7525110B2Apr 28, 2009

Multiple irradiation effect-corrected dose determination technique for charged particle beam lithography

NUFLARE TECHNOLOGY INC14 citations83
US7511290B2Mar 31, 2009

Charged particle beam writing method and apparatus

NUFLARE TECHNOLOGY INC16 citations83
US7872745B2Jan 18, 2011

Pattern inspection apparatus and pattern inspection method

NUFLARE TECHNOLOGY INC9 citations82
US7619230B2Nov 17, 2009

Charged particle beam writing method and apparatus and readable storage medium

NUFLARE TECHNOLOGY INC10 citations82

TOSHIBA KK

10 patents

HITACHI MEDICAL CORP

6 patents

SEMICONDUCTOR ENERGY LAB

4 patents

YOSHINO KOGYOSHO CO LTD

3 patents

OMRON TATEISI ELECTRONICS CO

2 patents

YASHIMA JUN

2 patents

YAMAZAKI SHUNPEI

1 patent

TSUCHIYA HIDEO

1 patent

HONDA MOTOR CO LTD

1 patent

KATO YASUO

1 patent

INABA SHINICHI

1 patent

EMI KEIKO

1 patent

OLYMPUS OPTICAL CO

1 patent

PANASONIC CORP

1 patent

TOYOTA MOTOR CO LTD

1 patent

Showing the top 50 of 132 patents by PatentIndex Score.