Inventor
DESAI DIXIT V
US4 patents
Patents
4 patentsUS11201036B2Dec 14, 2021
Plasma strip tool with uniformity control
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US10790119B2Sep 29, 2020
Plasma processing apparatus with post plasma gas injection
MATTSON TECH INC5 citations70
US11195718B2Dec 7, 2021
Spacer open process by dual plasma
MATTSON TECH INC0 citations49
US11749509B2Sep 5, 2023
Temperature control using temperature control element coupled to faraday shield
MATTSON TECH INC0 citations44