Inventor
KIM HUN SANG
US8 patents
⚠️ This page may combine multiple inventors who share the name “KIM HUN SANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS9425058B2Aug 23, 2016
Simplified litho-etch-litho-etch process
APPLIED MATERIALS INC145 citations95
US9287124B2Mar 15, 2016
Method of etching a boron doped carbon hardmask
APPLIED MATERIALS INC8 citations77
US10186444B2Jan 22, 2019
Gas flow for condensation reduction with a substrate processing chuck
APPLIED MATERIALS INC3 citations72
US11094511B2Aug 17, 2021
Processing chamber with substrate edge enhancement processing
APPLIED MATERIALS INC1 citations60
US10770329B2Sep 8, 2020
Gas flow for condensation reduction with a substrate processing chuck
APPLIED MATERIALS INC0 citations51
US9627216B2Apr 18, 2017
Method for forming features in a silicon containing layer
APPLIED MATERIALS INC0 citations37