Inventor
TAKINO YUSUKE
JP9 patents
⚠️ This page may combine multiple inventors who share the name “TAKINO YUSUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
8 patentsUS10593783B2Mar 17, 2020
Processing method
TOKYO ELECTRON LTD2 citations62
US11594418B2Feb 28, 2023
Etching method and etching apparatus
TOKYO ELECTRON LTD0 citations61
US12125710B2Oct 22, 2024
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations60
US12009219B2Jun 11, 2024
Substrate processing method
TOKYO ELECTRON LTD0 citations60
US12112954B2Oct 8, 2024
Etching method, substrate processing apparatus, and substrate processing system
TOKYO ELECTRON LTD1 citations59
US11361973B2Jun 14, 2022
Etching method and etching apparatus
TOKYO ELECTRON LTD1 citations59
US9412607B2Aug 9, 2016
Plasma etching method
TOKYO ELECTRON LTD1 citations50
US11462407B2Oct 4, 2022
Etching method and etching apparatus
TOKYO ELECTRON LTD0 citations45