Inventor
KAUSHAL TONY S
US15 patents
⚠️ This page may combine multiple inventors who share the name “KAUSHAL TONY S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
14 patentsUS6689252B1Feb 10, 2004
Abatement of hazardous gases in effluent
APPLIED MATERIALS INC80 citations98
US6490145B1Dec 3, 2002
Substrate support pedestal
APPLIED MATERIALS INC86 citations97
US6367412B1Apr 9, 2002
Porous ceramic liner for a plasma source
APPLIED MATERIALS INC135 citations97
US6391146B1May 21, 2002
Erosion resistant gas energizer
APPLIED MATERIALS INC73 citations96
US6468490B1Oct 22, 2002
Abatement of fluorine gas from effluent
APPLIED MATERIALS INC78 citations95
US6790768B2Sep 14, 2004
Methods and apparatus for polishing substrates comprising conductive and dielectric materials with reduced topographical defects
APPLIED MATERIALS INC13 citations92
US6673323B1Jan 6, 2004
Treatment of hazardous gases in effluent
APPLIED MATERIALS INC47 citations92
US7670688B2Mar 2, 2010
Erosion-resistant components for plasma process chambers
APPLIED MATERIALS INC15 citations84
US6824748B2Nov 30, 2004
Heated catalytic treatment of an effluent gas from a substrate fabrication process
APPLIED MATERIALS INC18 citations83
US6709314B2Mar 23, 2004
Chemical mechanical polishing endpoinat detection
APPLIED MATERIALS INC17 citations82
US6789498B2Sep 14, 2004
Elements having erosion resistance
APPLIED MATERIALS INC17 citations81
US6960521B2Nov 1, 2005
Method and apparatus for polishing metal and dielectric substrates
APPLIED MATERIALS INC6 citations73
US12191120B2Jan 7, 2025
Multilayer coating for corrosion resistance
APPLIED MATERIALS INC0 citations56
US12473659B2Nov 18, 2025
Conformal yttrium oxide coating
APPLIED MATERIALS INC0 citations52