Inventor
SONG DAESEOK
KR5 patents
Patents
5 patentsUS12313974B2May 27, 2025
Resist underlayer composition, and method of forming patterns using the composition
SAMSUNG SDI CO LTD0 citations59
US11675271B2Jun 13, 2023
Resist underlayer composition, and method of forming patterns using the composition
SAMSUNG SDI CO LTD0 citations59
US12554199B2Feb 17, 2026
Resist topcoat composition, and method of forming patterns using the composition
SAMSUNG SDI CO LTD0 citations49
US12590221B2Mar 31, 2026
Resist topcoat composition, and method of forming patterns using the composition
SAMSUNG SDI CO LTD0 citations48
US11987561B2May 21, 2024
Resist underlayer composition, and method of forming patterns using the composition
SAMSUNG SDI CO LTD0 citations47