Inventor
ALLEN HENRY V
US16 patents
⚠️ This page may combine multiple inventors who share the name “ALLEN HENRY V”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SILICON MICROSTRUCTURES INC
6 patentsUS7111518B1Sep 26, 2006
Extremely low cost pressure sensor realized using deep reactive ion etching
SILICON MICROSTRUCTURES INC66 citations97
US6150681ANov 21, 2000
Monolithic flow sensor and pressure sensor
SILICON MICROSTRUCTURES INC79 citations95
US7487681B1Feb 10, 2009
Pressure sensor adjustment using backside mask
SILICON MICROSTRUCTURES INC23 citations92
US6467354B1Oct 22, 2002
Anodically bonded, gas impervious cavity structures fabricated in silicon
SILICON MICROSTRUCTURES INC30 citations92
US6107170AAug 22, 2000
Silicon sensor contact with platinum silicide, titanium/tungsten and gold
SILICON MICROSTRUCTURES INC9 citations69
US6089099AJul 18, 2000
Method for forming a bonded silicon-glass pressure sensor with strengthened corners
SILICON MICROSTRUCTURES INC7 citations69