P

Inventor

NAKADA TAKAYUKI

JP53 patents
⚠️ This page may combine multiple inventors who share the name “NAKADA TAKAYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KOKUSAI ELECTRIC CORP

12 patents
US10950457B2Mar 16, 2021

Substrate processing device, manufacturing method for semiconductor device, and reaction tube

KOKUSAI ELECTRIC CORP5 citations83
US12123091B2Oct 22, 2024

Substrate processing apparatus and method of manufacturing semiconductor device

KOKUSAI ELECTRIC CORP2 citations73
US11512392B2Nov 29, 2022

Substrate processing apparatus

KOKUSAI ELECTRIC CORP2 citations73
US11495477B2Nov 8, 2022

Substrate processing apparatus

KOKUSAI ELECTRIC CORP2 citations73
US11124873B2Sep 21, 2021

Substrate processing apparatus

KOKUSAI ELECTRIC CORP4 citations73
US11935762B2Mar 19, 2024

Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium

KOKUSAI ELECTRIC CORP3 citations72
US11450536B2Sep 20, 2022

Substrate processing apparatus and method of manufacturing semiconductor device

KOKUSAI ELECTRIC CORP2 citations71
US11846025B2Dec 19, 2023

Substrate processing apparatus capable of adjusting inner pressure of process chamber thereof and method therefor

KOKUSAI ELECTRIC CORP2 citations68
US12062546B2Aug 13, 2024

Substrate processing device, manufacturing method for semiconductor device, and reaction tube

KOKUSAI ELECTRIC CORP1 citations62
US11155920B2Oct 26, 2021

Substrate processing apparatus, and method for manufacturing semiconductor device

KOKUSAI ELECTRIC CORP1 citations62
US12518981B2Jan 6, 2026

Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium

KOKUSAI ELECTRIC CORP0 citations60
US11211277B2Dec 28, 2021

Substrate processing apparatus

KOKUSAI ELECTRIC CORP0 citations52

HITACHI INT ELECTRIC INC

7 patents

OMORI TAKAFUMI

6 patents

NAKADA TAKAYUKI

6 patents

PANASONIC IP MAN CO LTD

4 patents

SINTOKOGIO LTD

4 patents

MORITA SHINYA

3 patents

SUDA HIROSHI

3 patents

PANASONIC ELEC WORKS CO LTD

2 patents

MATSUSHITA ELECTRIC WORKS LTD

1 patent

WADA SUMIO

1 patent

NAKADA SHIGEO

1 patent

Showing the top 50 of 53 patents by PatentIndex Score.