Inventor

KAI KOZO

JP3 patents

⚠️ This page may combine multiple inventors who share the name “KAI KOZO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

US5088697AFeb 18, 1992

Heat treating apparatus

TOKYO ELECTRON LTD7 citations71

US9318363B2Apr 19, 2016

Substrate processing system and substrate position correction method

TOKYO ELECTRON LTD4 citations66

KOBAYASHI KENICHI

1 patent

US9070728B2Jun 30, 2015

Method of lowering temperature of substrate table, computer-readable storage medium, and substrate processing system

KOBAYASHI KENICHI4 citations65