Inventor
WIRTH PAUL
US11 patents
⚠️ This page may combine multiple inventors who share the name “WIRTH PAUL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
10 patentsUS9245767B2Jan 26, 2016
Anneal module for semiconductor wafers
APPLIED MATERIALS INC3 citations71
US11823937B2Nov 21, 2023
Calibration of an aligner station of a processing system
APPLIED MATERIALS INC3 citations70
US11830760B2Nov 28, 2023
Servo-control system
APPLIED MATERIALS INC4 citations69
US11798833B2Oct 24, 2023
Methods of use of a servo control system
APPLIED MATERIALS INC2 citations68
US9399827B2Jul 26, 2016
Microelectronic substrate electro processing system
APPLIED MATERIALS INC1 citations61
US10923374B1Feb 16, 2021
Walking beam chamber
APPLIED MATERIALS INC0 citations60
US12278134B2Apr 15, 2025
Servo-control system
APPLIED MATERIALS INC0 citations57
US11772958B2Oct 3, 2023
Mass flow control based on micro-electromechanical devices
APPLIED MATERIALS INC0 citations56
US10837119B2Nov 17, 2020
Microelectronic substrate electro processing system
APPLIED MATERIALS INC0 citations51
US10087544B2Oct 2, 2018
Microelectronic substrate electro processing system
APPLIED MATERIALS INC0 citations51