Inventor
LEE JANG HYEOK
KR3 patents
Patents
3 patentsUS7700898B2Apr 20, 2010
Heat treatment equipment and method of driving the same
SAMSUNG ELECTRONICS CO LTD11 citations77
US6211010B1Apr 3, 2001
Method of forming hemispherical grains on a surface comprising pre-cleaning the surface in-situ with plasma
SAMSUNG ELECTRONICS CO LTD8 citations64
US7268895B2Sep 11, 2007
Inspection system and a method for inspecting a semiconductor wafer
SAMSUNG ELECTRONICS CO LTD0 citations47