Inventor
TICHENOR DANIEL A
US8 patents
⚠️ This page may combine multiple inventors who share the name “TICHENOR DANIEL A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EUV LLC
7 patentsUS6031598AFeb 29, 2000
Extreme ultraviolet lithography machine
EUV LLC148 citations97
US6469827B1Oct 22, 2002
Diffraction spectral filter for use in extreme-UV lithography condenser
EUV LLC79 citations95
US6815129B1Nov 9, 2004
Compensation of flare-induced CD changes EUVL
EUV LLC57 citations93
US6229871B1May 8, 2001
Projection lithography with distortion compensation using reticle chuck contouring
EUV LLC25 citations91
US7081992B2Jul 25, 2006
Condenser optic with sacrificial reflective surface
EUV LLC11 citations83
US7239443B2Jul 3, 2007
Condenser optic with sacrificial reflective surface
EUV LLC5 citations73
US6642995B2Nov 4, 2003
Mask-to-wafer alignment system
EUV LLC7 citations73