P

Inventor

JACOBSON PAUL T

US6 patents
⚠️ This page may combine multiple inventors who share the name “JACOBSON PAUL T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASM INC

4 patents
US6720531B1Apr 13, 2004

Light scattering process chamber walls

ASM INC369 citations98
US6158951ADec 12, 2000

Wafer carrier and method for handling of wafers with minimal contact

ASM INC34 citations90
US6318957B1Nov 20, 2001

Method for handling of wafers with minimal contact

ASM INC32 citations89
US10480095B2Nov 19, 2019

System for rapid bake of semiconductor substrate with upper linear heating elements perpendicular to horizontal gas flow

ASM INC0 citations51

TODD MICHAEL A

1 patent
US8088223B2Jan 3, 2012

System for control of gas injectors

TODD MICHAEL A14 citations82

HALPIN MICHAEL W

1 patent
US9885123B2Feb 6, 2018

Rapid bake of semiconductor substrate with upper linear heating elements perpendicular to horizontal gas flow

HALPIN MICHAEL W3 citations66