Inventor
NAKAJIMA TOSHIKI
JP17 patents
⚠️ This page may combine multiple inventors who share the name “NAKAJIMA TOSHIKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
8 patentsUS11804366B2Oct 31, 2023
Plasma processing apparatus
TOKYO ELECTRON LTD2 citations71
US11101114B2Aug 24, 2021
Plasma processing apparatus
TOKYO ELECTRON LTD3 citations71
US10192774B2Jan 29, 2019
Temperature control device for processing target object and method of selectively etching nitride film from multilayer film
TOKYO ELECTRON LTD2 citations71
US11832373B2Nov 28, 2023
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations59
US11470712B2Oct 11, 2022
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations59
US12494344B2Dec 9, 2025
Antenna for inductively coupled plasma excitation, antenna unit for inductively coupled plasma excitation, and plasma processing apparatus
TOKYO ELECTRON LTD0 citations50
US11348768B2May 31, 2022
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations49
US10950467B2Mar 16, 2021
Gas supply mechanism and semiconductor manufacturing system
TOKYO ELECTRON LTD0 citations46
SEIKO EPSON CORP
3 patentsUS5705302AJan 6, 1998
Color filter for liquid crystal display device and method for producing the color filter
SEIKO EPSON CORP78 citations93
US7365012B2Apr 29, 2008
Etching method, a method of forming a trench isolation structure, a semiconductor substrate and a semiconductor apparatus
SEIKO EPSON CORP2 citations62
US7875557B2Jan 25, 2011
Semiconductor substrate treating method, semiconductor component and electronic appliance
SEIKO EPSON CORP1 citations52