Inventor

HANAWA KAZUKI

JP2 patents

⚠️ This page may combine multiple inventors who share the name “HANAWA KAZUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

1 patent

US7859279B2Dec 28, 2010

Charge eliminating apparatus and method, and program storage medium

TOKYO ELECTRON LTD0 citations43

SHINOHARA EIICHI

1 patent

US8085052B2Dec 27, 2011

Charge eliminating apparatus and method, and program storage medium for removing static electricity from a target object such as a wafer

SHINOHARA EIICHI0 citations41